EFRE project: Vacuum coating system

 

The vacuum coating system has an integrated electron beam evaporator with six crucibles for different materials and two sources for thermal evaporation. The substrates to be coated are mounted on a heated and cooled turntable. Computer-assisted process control enables the automatic deposition of complex multilayer coatings.

 

coating system specifications:

  • chamber height 550 mm
  • pump system with turbomolecular pump and roots backing pump
  • final pressure < 10-6 mbar
  • process control of all sources, shutters, and sensors using integrated PC
  • substrate heating up to 400°C possible
  • water cooling of the substrate possible

 

electron beam evaporator specifications:

  • power 5 kW
  • 6 crucible holders

 

thermal evaporator specifications:

  • power 2 kW
  • double evaporator with two holders for evaporator boats
View into the vacuum chamber: at the top is the substrate holder, at the bottom left is the electron beam evaporator, and at the bottom right is the holder for the evaporator boats.
Front view of the system: the vacuum chamber is located behind the door on the left-hand side. It is operated via the touchscreen on the right-hand side.